Inventor
EDELSTEIN SERGIO
US20 patents
⚠️ This page may combine multiple inventors who share the name “EDELSTEIN SERGIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6350353B2Feb 26, 2002
Alternate steps of IMP and sputtering process to improve sidewall coverage
APPLIED MATERIALS INC175 citations99
US5796074AAug 18, 1998
Wafer heater assembly
APPLIED MATERIALS INC609 citations99
US6603269B1Aug 5, 2003
Resonant chamber applicator for remote plasma source
APPLIED MATERIALS INC252 citations97
US6368469B1Apr 9, 2002
Coils for generating a plasma and for sputtering
APPLIED MATERIALS INC48 citations96
US6290865B1Sep 18, 2001
Spin-rinse-drying process for electroplated semiconductor wafers
APPLIED MATERIALS INC77 citations96
US5691876ANov 25, 1997
High temperature polyimide electrostatic chuck
APPLIED MATERIALS INC74 citations96
US6783639B2Aug 31, 2004
Coils for generating a plasma and for sputtering
APPLIED MATERIALS INC21 citations92
US6254746B1Jul 3, 2001
Recessed coil for generating a plasma
APPLIED MATERIALS INC47 citations92
US5908334AJun 1, 1999
Electrical connector for power transmission in an electrostatic chuck
APPLIED MATERIALS INC41 citations92
US6254737B1Jul 3, 2001
Active shield for generating a plasma for sputtering
APPLIED MATERIALS INC19 citations91
KLA TENCOR TECH CORP
7 patentsUS7369233B2May 6, 2008
Optical system for measuring samples using short wavelength radiation
KLA TENCOR TECH CORP62 citations98
US7893703B2Feb 22, 2011
Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer
KLA TENCOR TECH CORP104 citations96
US7248062B1Jul 24, 2007
Contactless charge measurement of product wafers and control of corona generation and deposition
KLA TENCOR TECH CORP30 citations92
US7719294B1May 18, 2010
Systems configured to perform a non-contact method for determining a property of a specimen
KLA TENCOR TECH CORP10 citations83
US7098050B1Aug 29, 2006
Corona based charge voltage measurement
KLA TENCOR TECH CORP6 citations71
US7538333B1May 26, 2009
Contactless charge measurement of product wafers and control of corona generation and deposition
KLA TENCOR TECH CORP3 citations62
US7345306B1Mar 18, 2008
Corona based charge voltage measurement
KLA TENCOR TECH CORP0 citations49