P

Inventor

ZHANG XIAFANG

US6 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG XIAFANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents
US8004290B1Aug 23, 2011

Method and apparatus for determining dielectric layer properties

KLA TENCOR CORP12 citations82
US7525304B1Apr 28, 2009

Measurement of effective capacitance

KLA TENCOR CORP18 citations82
US7724003B1May 25, 2010

Substrate conditioning for corona charge control

KLA TENCOR CORP2 citations55

KLA TENCOR TECH CORP

2 patents
US7098050B1Aug 29, 2006

Corona based charge voltage measurement

KLA TENCOR TECH CORP6 citations71
US7345306B1Mar 18, 2008

Corona based charge voltage measurement

KLA TENCOR TECH CORP0 citations49

SHIH MENG-FU

1 patent
US9239522B2Jan 19, 2016

Method of determining an asymmetric property of a structure

SHIH MENG-FU0 citations32