Inventor

HANDA YUJIN

JP3 patents

⚠️ This page may combine multiple inventors who share the name “HANDA YUJIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

2 patents

US7598504B2Oct 6, 2009

Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus

NUFLARE TECHNOLOGY INC4 citations57

US7900185B2Mar 1, 2011

Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus

NUFLARE TECHNOLOGY INC1 citations47

HANDA YUJIN

1 patent

US8423921B2Apr 16, 2013

Data verification method and charged particle beam writing apparatus

HANDA YUJIN2 citations53