Inventor

CHIKUMA TAKAMASA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “CHIKUMA TAKAMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9318363B2Apr 19, 2016

Substrate processing system and substrate position correction method

TOKYO ELECTRON LTD4 citations66

US6999830B2Feb 14, 2006

Method and device for processing semiconductor wafer

TOKYO ELECTRON LTD1 citations49

IKEDA GAKU

1 patent

US9223305B2Dec 29, 2015

Semiconductor manufacturing system

IKEDA GAKU1 citations39