Inventor

GOMI SATOSHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “GOMI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US11823877B2Nov 21, 2023

Substrate processing system, substrate processing method, and controller

TOKYO ELECTRON LTD0 citations57

US11276592B2Mar 15, 2022

Processing apparatus and processing method

TOKYO ELECTRON LTD0 citations48

CHINO TAKASHI

1 patent

US8581153B2Nov 12, 2013

Method of detecting abnormal placement of substrate, substrate processing method, computer-readable storage medium, and substrate processing apparatus

CHINO TAKASHI1 citations41

IKEDA GAKU

1 patent

US9223305B2Dec 29, 2015

Semiconductor manufacturing system

IKEDA GAKU1 citations39