Inventor
HU HUAYONG
CN12 patents
⚠️ This page may combine multiple inventors who share the name “HU HUAYONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR MFG INT SHANGHAI CORP
9 patentsUS9711529B2Jul 18, 2017
3D NAND device and fabrication method thereof
SEMICONDUCTOR MFG INT SHANGHAI CORP32 citations93
US10763275B2Sep 1, 2020
3D NAND device
SEMICONDUCTOR MFG INT SHANGHAI CORP1 citations61
US10105722B2Oct 23, 2018
Photoresist coating apparatus and methods
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations51
US9645499B2May 9, 2017
Photoresist with top-coating photo-decomposable base for photolithography
SEMICONDUCTOR MFG INT SHANGHAI CORP1 citations49
US10427185B2Oct 1, 2019
Patterning method
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations48
US9576828B2Feb 21, 2017
Heat reservoir chamber, and method for thermal treatment
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations48
US9547236B2Jan 17, 2017
Patterning apparatus and patterning methods thereof
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations48
US9606451B2Mar 28, 2017
Exposure apparatus, photolithographical reticles and exposure methods thereof
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations40
US9640446B2May 2, 2017
Semiconductor structure and fabrication method thereof
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations32