Inventor

LEE CHARLES KWOK FUNG

CN2 patents

Patents

2 patents

US10427185B2Oct 1, 2019

Patterning method

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations48

US9547236B2Jan 17, 2017

Patterning apparatus and patterning methods thereof

SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations48