Inventor
UH JIHO
KR6 patents
Patents
6 patentsUS11476151B2Oct 18, 2022
Vacuum chuck, substrate processing apparatus including the same and related method of manufacture
SAMSUNG ELECTRONICS CO LTD4 citations66
US11948814B2Apr 2, 2024
Valve structure and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations64
US12424465B2Sep 23, 2025
Valve structure and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations53
US11600511B2Mar 7, 2023
Substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51
US12360072B2Jul 15, 2025
PH monitoring systems having sensor modules
SAMSUNG ELECTRONICS CO LTD0 citations47
US12490368B2Dec 2, 2025
Junction temperature estimation device and plasma generating system including the same
SAMSUNG ELECTRONICS CO LTD0 citations42