Inventor
CHOI DAEHAN
KR5 patents
⚠️ This page may combine multiple inventors who share the name “CHOI DAEHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS7390749B2Jun 24, 2008
Self-aligned pitch reduction
LAM RES CORP41 citations92
US7910489B2Mar 22, 2011
Infinitely selective photoresist mask etch
LAM RES CORP16 citations83
US7560388B2Jul 14, 2009
Self-aligned pitch reduction
LAM RES CORP6 citations62
US7476610B2Jan 13, 2009
Removable spacer
LAM RES CORP1 citations50