Inventor

LIPHARDT MARTIN M

US123 patents

⚠️ This page may combine multiple inventors who share the name “LIPHARDT MARTIN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIPHARDT MARTIN M

J A WOOLLAM CO INC

Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation

Spectroscopic ellipsometer and polarimeter systems

Discrete polarization state spectroscopic ellipsometer system and method of use

Spectroscopic ellipsometer and polarimeter systems

Discrete polarization state spectroscopic ellipsometer system and method of use

Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry

Rotating compensator ellipsometer system with spatial filter

Spectrophotometer, ellipsometer, polarimeter and the like systems

Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems

Operation of an electromagnetic radiation focusing element

System for naturally adjusting the cross-sectional area of a beam of electromagnetic radiation entered to a focusing means

Fast sample height, AOI and POI alignment in mapping ellipsometer or the like

Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems

Automated ellipsometer and the like systems

Automated ellipsometer and the like systems

Rotating compensator ellipsometer system with spatial filter equivalent

Reduced gas flow purging system in reflectometer, ellipsometer, polarimeter and the like systems

Spectroscopic ellipsometer and polarimeter systems

Sample orientation system and method

System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidence

Sample orientation system and method

System and method for setting and compensating errors in AOI and POI of a beam of EM radiation

Sample orientation system and method

System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing

Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sample

Sample analysis methodology utilizing electromagnetic radiation

Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems

Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample

System and method of applying xenon arc-lamps to provide 193 nm wavelengths

Control of beam spot size in ellipsometer and the like systems

Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence

Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface

Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like

Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter

Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses

Systems and methods for producing a more uniform intensity wavelength dispersed beam of electromagnetic radiation entering a multielement detector, while maintaining information content therein

Beam focusing and reflecting optics with enhanced detector system

Operation of an electromagnetic radiation focusing element

Information maintenance, intensity attenuation, and angle/plane of incidence control in electromagentic beams

Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area

Beam focusing and beam collecting optics

LIPHARDT MARTIN M

Mapping ellipsometers and polarimeters comprising polarization state compensating beam directing means, and method of use

View-finder in ellipsometer or the like systems

Sample mapping in environmental chamber

HERZINGER CRAIG M

Terahertz-infrared ellipsometer system, and method of use

Terahertz-infrared ellipsometer system, and method of use

Terahertz-infrared ellipsometer system, and method of use

JAMES D WELCH

Spectroscopic ellipsometer and polarimeter systems

J A WOOLLAN CO INC

Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems

GREEN STEVEN E

UV-IR range variable angle spectroscopic ellipsometer