Inventor
WOOLLAM JOHN A
US64 patents
⚠️ This page may combine multiple inventors who share the name “WOOLLAM JOHN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
J A WOOLLAM CO INC
37 patentsUS7633625B1Dec 15, 2009
Spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC115 citations98
US6937341B1Aug 30, 2005
System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation
J A WOOLLAM CO INC96 citations97
US5956145ASep 21, 1999
System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems
J A WOOLLAM CO INC85 citations96
US5757494AMay 26, 1998
System and method for improving data acquisition capability in spectroscopic ellipsometers
J A WOOLLAM CO INC77 citations96
US5666201ASep 9, 1997
Multiple order dispersive optics system and method of use
J A WOOLLAM CO INC95 citations96
US5521706AMay 28, 1996
System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
J A WOOLLAM CO INC107 citations96
US5504582AApr 2, 1996
System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
J A WOOLLAM CO INC83 citations94
US7158231B1Jan 2, 2007
Spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC26 citations93
US6982792B1Jan 3, 2006
Spectrophotometer, ellipsometer, polarimeter and the like systems
J A WOOLLAM CO INC49 citations92
US6859278B1Feb 22, 2005
Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems
J A WOOLLAM CO INC29 citations92
US5805285ASep 8, 1998
Multiple order dispersive optics system and method of use
J A WOOLLAM CO INC43 citations92
US5582646ADec 10, 1996
Ellipsometer/polarimeter based process monitor and control system suitable for simultaneous retrofit on molecular beam epitaxy system RHEED/LEED interface system, and method of use
J A WOOLLAM CO INC43 citations92
US7746471B1Jun 29, 2010
Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
J A WOOLLAM CO INC13 citations84
US7746472B1Jun 29, 2010
Automated ellipsometer and the like systems
J A WOOLLAM CO INC8 citations84
US7505134B1Mar 17, 2009
Automated ellipsometer and the like systems
J A WOOLLAM CO INC15 citations84
US7336361B1Feb 26, 2008
Spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC15 citations84
US7304792B1Dec 4, 2007
System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidence
J A WOOLLAM CO INC11 citations84
US7295313B1Nov 13, 2007
Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
J A WOOLLAM CO INC12 citations84
US6940595B1Sep 6, 2005
Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
J A WOOLLAM CO INC14 citations84
US7768660B1Aug 3, 2010
Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sample
J A WOOLLAM CO INC12 citations83
US7385697B2Jun 10, 2008
Sample analysis methodology utilizing electromagnetic radiation
J A WOOLLAM CO INC19 citations83
US7274450B1Sep 25, 2007
Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems
J A WOOLLAM CO INC19 citations83
US9851294B1Dec 26, 2017
Integrated mid-infrared, far infrared and terahertz optical Hall effect (OHE) instrument, and method of use
J A WOOLLAM CO INC9 citations81
US7345762B1Mar 18, 2008
Control of beam spot size in ellipsometer and the like systems
J A WOOLLAM CO INC8 citations74
US7304737B1Dec 4, 2007
Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence
J A WOOLLAM CO INC8 citations74
US7283234B1Oct 16, 2007
Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface
J A WOOLLAM CO INC7 citations74
US7265838B1Sep 4, 2007
Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like
J A WOOLLAM CO INC8 citations74
US7245376B2Jul 17, 2007
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
J A WOOLLAM CO INC9 citations74
US7193710B1Mar 20, 2007
Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses
J A WOOLLAM CO INC9 citations74
US7030982B1Apr 18, 2006
Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of accumulated material
J A WOOLLAM CO INC8 citations74
US10073120B1Sep 11, 2018
Integrated vacuum-ultraviolet, mid and near-ultraviolet, visible, near, mid and far infrared and terahertz optical hall effect (OHE) instrument, and method of use
J A WOOLLAM CO INC7 citations69
US10026167B1Jul 17, 2018
Method of obtaining micrographs of transparent or semi-transparent specimens using anisotropic contrast
J A WOOLLAM CO INC6 citations68
US7623237B1Nov 24, 2009
Sample investigating system
J A WOOLLAM CO INC5 citations63
US7522279B1Apr 21, 2009
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
J A WOOLLAM CO INC4 citations63
US7385698B1Jun 10, 2008
System and method of selectively monitoring sample front and backside reflections in ellipsometer and the like systems
J A WOOLLAM CO INC4 citations63
US7349092B1Mar 25, 2008
System for reducing stress induced effects during determination of fluid optical constants
J A WOOLLAM CO INC4 citations63
US7317529B1Jan 8, 2008
Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples
J A WOOLLAM CO INC2 citations63
UNIV NEBRASKA
3 patentsHERZINGER CRAIG M
3 patentsUS8705032B2Apr 22, 2014
Terahertz-infrared ellipsometer system, and method of use
HERZINGER CRAIG M7 citations83
US8416408B1Apr 9, 2013
Terahertz-infrared ellipsometer system, and method of use
HERZINGER CRAIG M8 citations83
US8169611B2May 1, 2012
Terahertz-infrared ellipsometer system, and method of use
HERZINGER CRAIG M10 citations81
NASA
2 patentsJAMES D WELCH
1 patentJ A WOOLLAM CO
1 patentJ A WOOLLAN CO INC
1 patentUS OF AMERICA ASTHE ADMINISTRA
1 patentSCHUBERT MATHIAS M
1 patentShowing the top 50 of 64 patents by PatentIndex Score.