Inventor
MURAYAMA MASAYUKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MURAYAMA MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
8 patentsUS6496257B1Dec 17, 2002
Projection exposure apparatus and method
NIKON CORP291 citations98
US7061575B2Jun 13, 2006
Projection exposure apparatus and method
NIKON CORP54 citations95
US6341006B1Jan 22, 2002
Projection exposure apparatus
NIKON CORP99 citations95
US6456377B1Sep 24, 2002
Method for measuring optical feature of exposure apparatus and exposure apparatus having means for measuring optical feature
NIKON CORP30 citations92
US6172373B1Jan 9, 2001
Stage apparatus with improved positioning capability
NIKON CORP44 citations92
US6535270B1Mar 18, 2003
Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
NIKON CORP42 citations91
US6961114B2Nov 1, 2005
Optical apparatus and exposure apparatus incorporating the apparatus
NIKON CORP12 citations83
US6825932B2Nov 30, 2004
Method for measuring optical feature of exposure apparatus and exposure apparatus having means for measuring optical feature
NIKON CORP3 citations62