Inventor
SETOGUCHI KATSUMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SETOGUCHI KATSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS6700090B2Mar 2, 2004
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP9 citations73
US7611993B2Nov 3, 2009
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP2 citations62
US7381951B2Jun 3, 2008
Charged particle beam adjustment method and apparatus
HITACHI HIGH TECH CORP4 citations62
US6888094B2May 3, 2005
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP3 citations62
US11170969B2Nov 9, 2021
Electron beam observation device, electron beam observation system, and control method of electron beam observation device
HITACHI HIGH TECH CORP0 citations61
US11791130B2Oct 17, 2023
Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation device
HITACHI HIGH TECH CORP0 citations50