Inventor
SAPPEY ROMAIN
US7 patents
⚠️ This page may combine multiple inventors who share the name “SAPPEY ROMAIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS7847954B2Dec 7, 2010
Measuring the shape and thickness variation of a wafer with high slopes
KLA TENCOR CORP13 citations82
US7554654B2Jun 30, 2009
Surface characteristic analysis
KLA TENCOR CORP12 citations81
US9772289B2Sep 26, 2017
System and method for defect detection and photoluminescence measurement of a sample
KLA TENCOR CORP5 citations70
US9410890B2Aug 9, 2016
Methods and apparatus for spectral luminescence measurement
KLA TENCOR CORP4 citations70
US9354177B2May 31, 2016
System and method for defect detection and photoluminescence measurement of a sample
KLA TENCOR CORP2 citations60
US7505143B2Mar 17, 2009
Dynamic reference plane compensation
KLA TENCOR CORP0 citations39