Inventor
HAN SEUNGCHUL
KR5 patents
⚠️ This page may combine multiple inventors who share the name “HAN SEUNGCHUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS11964357B2Apr 23, 2024
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11471996B2Oct 18, 2022
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11590628B2Feb 28, 2023
Rotary body module and chemical mechanical polishing apparatus having the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US11605551B2Mar 14, 2023
Chuck assembly, semiconductor device fabricating apparatus including the same, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations51