Inventor

NEIL MARK A

US4 patents

⚠️ This page may combine multiple inventors who share the name “NEIL MARK A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

2 patents

US7241991B1Jul 10, 2007

Region-of-interest based electron beam metrology

KLA TENCOR TECH CORP10 citations79

US7041976B1May 9, 2006

Automated focusing of electron image

KLA TENCOR TECH CORP10 citations70

KLA TENCOR CORP

2 patents

US10151631B2Dec 11, 2018

Spectroscopy with tailored spectral sampling

KLA TENCOR CORP0 citations38

US10429296B2Oct 1, 2019

Multilayer film metrology using an effective media approximation

KLA TENCOR CORP0 citations36