Inventor
DESHPANDE SACHIN
US12 patents
⚠️ This page may combine multiple inventors who share the name “DESHPANDE SACHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7801635B2Sep 21, 2010
Real-time parameter tuning for etch processes
TOKYO ELECTRON LTD13 citations83
US7642102B2Jan 5, 2010
Real-time parameter tuning using wafer thickness
TOKYO ELECTRON LTD15 citations83
US7517708B2Apr 14, 2009
Real-time parameter tuning using wafer temperature
TOKYO ELECTRON LTD20 citations83
US7451054B2Nov 11, 2008
Method of using a wafer-temperature-dependent profile library
TOKYO ELECTRON LTD10 citations83
US7571074B2Aug 4, 2009
Method of using a wafer-thickness-dependant profile library
TOKYO ELECTRON LTD3 citations62
US7515283B2Apr 7, 2009
Parallel profile determination in optical metrology
TOKYO ELECTRON LTD0 citations48
US7469192B2Dec 23, 2008
Parallel profile determination for an optical metrology system
TOKYO ELECTRON LTD0 citations38