Inventor
AITKEN DEREK
GB14 patents
⚠️ This page may combine multiple inventors who share the name “AITKEN DEREK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS4578589AMar 25, 1986
Apparatus and methods for ion implantation
APPLIED MATERIALS INC145 citations97
US4847504AJul 11, 1989
Apparatus and methods for ion implantation
APPLIED MATERIALS INC121 citations96
US4587432AMay 6, 1986
Apparatus for ion implantation
APPLIED MATERIALS INC85 citations96
US5389793AFeb 14, 1995
Apparatus and methods for ion implantation
APPLIED MATERIALS INC90 citations94
US4754200AJun 28, 1988
Systems and methods for ion source control in ion implanters
APPLIED MATERIALS INC54 citations94
US4743767AMay 10, 1988
Systems and methods for ion implantation
APPLIED MATERIALS INC78 citations94
US4782304ANov 1, 1988
Systems and methds for ion beam acceleration
APPLIED MATERIALS INC39 citations92
US4682566AJul 28, 1987
Evacuated equipment
APPLIED MATERIALS INC40 citations92
SUPERION LTD
5 patentsUS6498348B2Dec 24, 2002
Apparatus and method relating to charged particles
SUPERION LTD40 citations92
US5300785AApr 5, 1994
Apparatus for and method of producing ion beams
SUPERION LTD23 citations92
US5099130AMar 24, 1992
Apparatus and methods relating to scanning ion beams
SUPERION LTD21 citations81
US5194748AMar 16, 1993
Method and apparatus relating to ion implantation
SUPERION LTD15 citations73
US5124557AJun 23, 1992
Apparatus and methods relating to ion implantation and heat transfer
SUPERION LTD17 citations73