Inventor
VAN DER WERF JAN E
NL12 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER WERF JAN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PHILIPS CORP
10 patentsUS6046792AApr 4, 2000
Differential interferometer system and lithographic step-and-scan apparatus provided with such a system
PHILIPS CORP849 citations99
US5674650AOct 7, 1997
Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method
PHILIPS CORP170 citations99
US5910847AJun 8, 1999
Method of determining the radiation dose in a lithographic apparatus
PHILIPS CORP59 citations95
US5026166AJun 25, 1991
Apparatus for pre-aligning substrate preparatory to fine alignment
PHILIPS CORP27 citations92
US4749278AJun 7, 1988
Arrangement for aligning a mask and a substrate relative to each other
PHILIPS CORP25 citations92
US5917604AJun 29, 1999
Alignment device and lithographic apparatus provided with such a device
PHILIPS CORP46 citations91
US5673101ASep 30, 1997
Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method
PHILIPS CORP29 citations91
US5485272AJan 16, 1996
Radiation-source unit for generating a beam having two directions of polarisation and two frequencies
PHILIPS CORP51 citations91
US4253019AFeb 24, 1981
Apparatus for reading an optical record carrier having a radiation-reflecting information structure
PHILIPS CORP9 citations73
US4866262ASep 12, 1989
Optical imaging arrangement comprising an opto-electronic focussing-error detection system
PHILIPS CORP17 citations69