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Inventor
STEVENSON JOEL O
US
2 patents
Patents
2 patents
US4995954A
Feb 26, 1991
Porous siliconformation and etching process for use in silicon micromachining
US ENERGY
15 citations
67
US5015346A
May 14, 1991
Electrochemical method for defect delineation in silicon-on-insulator wafers
US ENERGY
3 citations
59