P

Inventor

KATO YOSHIHIDE

JP6 patents
⚠️ This page may combine multiple inventors who share the name “KATO YOSHIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO SHIBAURA ELECTRIC CO

3 patents
US4717645AJan 5, 1988

Method and apparatus for forming resist pattern

TOKYO SHIBAURA ELECTRIC CO26 citations91
US5051338ASep 24, 1991

Method and apparatus for forming resist pattern

TOKYO SHIBAURA ELECTRIC CO16 citations80
US4897337AJan 30, 1990

Method and apparatus for forming resist pattern

TOKYO SHIBAURA ELECTRIC CO7 citations72

TOSHIBA KK

2 patents
US4712013ADec 8, 1987

Method of forming a fine pattern with a charged particle beam

TOSHIBA KK74 citations95
US7359043B2Apr 15, 2008

Pattern inspecting method and pattern inspecting apparatus

TOSHIBA KK4 citations60

UNIV MISSOURI

1 patent
US7732033B2Jun 8, 2010

Sealants for structural member joints and methods of using same

UNIV MISSOURI20 citations89