Inventor
KIRITA KEI
JP5 patents
Patents
5 patentsUS4717645AJan 5, 1988
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO26 citations91
US5051338ASep 24, 1991
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO16 citations80
US4496843AJan 29, 1985
Method for producing metal ions
TOKYO SHIBAURA ELECTRIC CO22 citations74
US4897337AJan 30, 1990
Method and apparatus for forming resist pattern
TOKYO SHIBAURA ELECTRIC CO7 citations72
US4063973ADec 20, 1977
Method of making a semiconductor device
TOKYO SHIBAURA ELECTRIC CO14 citations68