Inventor
BEAULIEU DAVID R
US14 patents
⚠️ This page may combine multiple inventors who share the name “BEAULIEU DAVID R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
5 patentsUS6547510B1Apr 15, 2003
Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
BROOKS AUTOMATION INC90 citations97
US5991510ANov 23, 1999
Removable memory device to store robotic application and configuration data
BROOKS AUTOMATION INC22 citations92
US7677859B2Mar 16, 2010
Substrate loading and uploading station with buffer
BROOKS AUTOMATION INC10 citations84
US6279412B1Aug 28, 2001
Corrosion resistant exoskeleton arm linkage assembly
BROOKS AUTOMATION INC19 citations84
US9670010B2Jun 6, 2017
Substrate loading and unloading station with buffer
BROOKS AUTOMATION INC0 citations50