Inventor
NISHIZATO HIROSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NISHIZATO HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS5419924AMay 30, 1995
Chemical vapor deposition method and apparatus therefore
APPLIED MATERIALS INC77 citations96
US5645642AJul 8, 1997
Method for in-situ liquid flow rate estimation and verification
APPLIED MATERIALS INC35 citations92
US5520969AMay 28, 1996
Method for in-situ liquid flow rate estimation and verification
APPLIED MATERIALS INC20 citations92
US5440887AAug 15, 1995
Liquid vaporizer-feeder
APPLIED MATERIALS INC30 citations92
US5531183AJul 2, 1996
Vaporization sequence for multiple liquid precursors used in semiconductor thin film applications
APPLIED MATERIALS INC29 citations91
US6464782B1Oct 15, 2002
Apparatus for vaporization sequence for multiple liquid precursors used in semiconductor thin film applications
APPLIED MATERIALS INC11 citations73
US5272880ADec 28, 1993
Liquid vaporizer-feeder
APPLIED MATERIALS INC18 citations73
HORIBA STEC CO LTD
3 patentsUS10927462B2Feb 23, 2021
Gas control system and film formation apparatus provided with gas control system
HORIBA STEC CO LTD4 citations71
US10138555B2Nov 27, 2018
Gas control system and program for gas control system
HORIBA STEC CO LTD3 citations69
US10747239B2Aug 18, 2020
Fluid control device, fluid control method, and program recording medium recorded with program for fluid control device
HORIBA STEC CO LTD0 citations41