Inventor
NOVEMBRE ANTHONY EDWARD
US6 patents
⚠️ This page may combine multiple inventors who share the name “NOVEMBRE ANTHONY EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
5 patentsUS5948570ASep 7, 1999
Process for dry lithographic etching
LUCENT TECHNOLOGIES INC123 citations96
US5656182AAug 12, 1997
Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials
LUCENT TECHNOLOGIES INC31 citations90
US5688634ANov 18, 1997
Energy sensitive resist material and process for device fabrication using the resist material
LUCENT TECHNOLOGIES INC21 citations88
US6051346AApr 18, 2000
Process for fabricating a lithographic mask
LUCENT TECHNOLOGIES INC17 citations82
US5985493ANov 16, 1999
Membrane mask for projection lithography
LUCENT TECHNOLOGIES INC6 citations60