Inventor
COWAN PATRICK M
US4 patents
Patents
4 patentsUS6594589B1Jul 15, 2003
Method and apparatus for monitoring tool health
ADVANCED MICRO DEVICES INC77 citations96
US6740534B1May 25, 2004
Determination of a process flow based upon fault detection analysis
ADVANCED MICRO DEVICES INC34 citations91
US6925347B1Aug 2, 2005
Process control based on an estimated process result
ADVANCED MICRO DEVICES INC13 citations83
US6960774B2Nov 1, 2005
Fault detection and control methodologies for ion implantation processes, and system for performing same
ADVANCED MICRO DEVICES INC10 citations71