Inventor

POLLARD PETER JULIAN

NL2 patents

⚠️ This page may combine multiple inventors who share the name “POLLARD PETER JULIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7969549B2Jun 28, 2011

Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method

ASML NETHERLANDS BV4 citations61

BOOM HERMAN

1 patent

US8237912B2Aug 7, 2012

Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method

BOOM HERMAN3 citations55