Inventor
SALIAN ARVIND S
US5 patents
⚠️ This page may combine multiple inventors who share the name “SALIAN ARVIND S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FREESCALE SEMICONDUCTOR INC
4 patentsUS7109055B2Sep 19, 2006
Methods and apparatus having wafer level chip scale package for sensing elements
FREESCALE SEMICONDUCTOR INC60 citations95
US7030469B2Apr 18, 2006
Method of forming a semiconductor package and structure thereof
FREESCALE SEMICONDUCTOR INC332 citations93
US7316965B2Jan 8, 2008
Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level
FREESCALE SEMICONDUCTOR INC13 citations83
US9988260B2Jun 5, 2018
Rough MEMS surface
FREESCALE SEMICONDUCTOR INC1 citations51