Inventor
CHEN SHU-FANG
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHEN SHU-FANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9711367B1Jul 18, 2017
Semiconductor method with wafer edge modification
TAIWAN SEMICONDUCTOR MFG CO LTD23 citations92
US12068368B2Aug 20, 2024
Shallow trench isolation (STI) contact structures and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11374089B2Jun 28, 2022
Shallow trench isolation (STI) contact structures and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US10101659B2Oct 16, 2018
Lithography method with surface modification layer
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations48