Inventor
BANG WON
US14 patents
Patents
14 patentsUS6110556AAug 29, 2000
Lid assembly for a process chamber employing asymmetric flow geometries
APPLIED MATERIALS INC218 citations99
US6267820B1Jul 31, 2001
Clog resistant injection valve
APPLIED MATERIALS INC16 citations92
US6261374B1Jul 17, 2001
Clog resistant gas delivery system
APPLIED MATERIALS INC27 citations92
US5948958ASep 7, 1999
Method and apparatus for verifying the calibration of semiconductor processing equipment
APPLIED MATERIALS INC24 citations92
US7011710B2Mar 14, 2006
Concentration profile on demand gas delivery system (individual divert delivery system)
APPLIED MATERIALS INC29 citations91
US6063198AMay 16, 2000
High pressure release device for semiconductor fabricating equipment
APPLIED MATERIALS INC37 citations89
US7192486B2Mar 20, 2007
Clog-resistant gas delivery system
APPLIED MATERIALS INC15 citations83
US6379492B2Apr 30, 2002
Corrosion resistant coating
APPLIED MATERIALS INC9 citations73
US6235120B1May 22, 2001
Coating for parts used in semiconductor processing chambers
APPLIED MATERIALS INC7 citations73
US7413612B2Aug 19, 2008
In situ substrate holder leveling method and apparatus
APPLIED MATERIALS INC8 citations68
US6793965B2Sep 21, 2004
Clog resistant injection valve
APPLIED MATERIALS INC4 citations62
US7754282B2Jul 13, 2010
Adjusting a spacing between a gas distribution member and a substrate support
APPLIED MATERIALS INC2 citations59
US7806383B2Oct 5, 2010
Slit valve
APPLIED MATERIALS INC6 citations58
US6346481B1Feb 12, 2002
Method of reducing pitting of a coated heater
APPLIED MATERIALS INC0 citations52