Inventor

WANG YEN-KUN VICTOR

US10 patents

⚠️ This page may combine multiple inventors who share the name “WANG YEN-KUN VICTOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US6506994B2Jan 14, 2003

Low profile thick film heaters in multi-slot bake chamber

APPLIED MATERIALS INC22 citations92

US7722719B2May 25, 2010

Gas baffle and distributor for semiconductor processing chamber

APPLIED MATERIALS INC22 citations90

US7841582B2Nov 30, 2010

Variable seal pressure slit valve doors for semiconductor manufacturing equipment

APPLIED MATERIALS INC4 citations62

US7754282B2Jul 13, 2010

Adjusting a spacing between a gas distribution member and a substrate support

APPLIED MATERIALS INC2 citations59

LAM RES CORP

3 patents

US8628675B2Jan 14, 2014

Method for reduction of voltage potential spike during dechucking

LAM RES CORP7 citations81

US8624210B2Jan 7, 2014

Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates

LAM RES CORP5 citations66

USRE47275EMar 5, 2019

Substrate support providing gap height and planarization adjustment in plasma processing chamber

LAM RES CORP1 citations56

MCMILLIN BRIAN

1 patent

US8313612B2Nov 20, 2012

Method and apparatus for reduction of voltage potential spike during dechucking

MCMILLIN BRIAN55 citations92

WANG YEN-KUN VICTOR

1 patent

US8492736B2Jul 23, 2013

Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates

WANG YEN-KUN VICTOR10 citations78

ANTOLIK JERREL KENT

1 patent

US8895452B2Nov 25, 2014

Substrate support providing gap height and planarization adjustment in plasma processing chamber

ANTOLIK JERREL KENT12 citations76