Inventor
HUNG AI-JEN
TW5 patents
Patents
5 patentsUS9805154B2Oct 31, 2017
Method of lithography process with inserting scattering bars
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US11966170B2Apr 23, 2024
Lithographic overlay correction and lithographic process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10831110B2Nov 10, 2020
Lithographic overlay correction and lithographic process
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US9733577B2Aug 15, 2017
Intra-field process control for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9588446B2Mar 7, 2017
Calibration apparatus and an adjustment method for a lithography apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37