Inventor
MORIWAKA TOMOAKI
JP81 patents
⚠️ This page may combine multiple inventors who share the name “MORIWAKA TOMOAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
43 patentsUS7709309B2May 4, 2010
Semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB50 citations98
US7078281B2Jul 18, 2006
Method of manufacturing a semiconductor device by providing a mirror in the attenuation region
SEMICONDUCTOR ENERGY LAB69 citations98
US6750423B2Jun 15, 2004
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB71 citations98
US6841434B2Jan 11, 2005
Method of fabricating semiconductor device
SEMICONDUCTOR ENERGY LAB43 citations96
US9553202B2Jan 24, 2017
Semiconductor device, manufacturing method thereof, and electronic device
SEMICONDUCTOR ENERGY LAB17 citations93
US7418172B2Aug 26, 2008
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB31 citations93
US7169630B2Jan 30, 2007
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB27 citations93
US7112517B2Sep 26, 2006
Laser treatment device, laser treatment method, and semiconductor device fabrication method
SEMICONDUCTOR ENERGY LAB25 citations93
US7994021B2Aug 9, 2011
Method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB23 citations92
US11380688B2Jul 5, 2022
Capacitor, semiconductor device, and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB6 citations85
US11211500B2Dec 28, 2021
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB9 citations85
US10658389B2May 19, 2020
Semiconductor device, manufacturing method thereof, and electronic device
SEMICONDUCTOR ENERGY LAB5 citations84
US9773820B2Sep 26, 2017
Wiring layer and manufacturing method therefor
SEMICONDUCTOR ENERGY LAB5 citations84
US7978412B2Jul 12, 2011
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB9 citations84
US7972943B2Jul 5, 2011
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB7 citations84
US7935584B2May 3, 2011
Method for manufacturing crystalline semiconductor device
SEMICONDUCTOR ENERGY LAB9 citations84
US7795114B2Sep 14, 2010
Manufacturing methods of SOI substrate and semiconductor device
SEMICONDUCTOR ENERGY LAB12 citations84
US7790572B2Sep 7, 2010
Method for manufacturing semiconductor substrate
SEMICONDUCTOR ENERGY LAB10 citations84
US7662703B2Feb 16, 2010
Method for manufacturing crystalline semiconductor film and semiconductor device
SEMICONDUCTOR ENERGY LAB17 citations84
US7486444B2Feb 3, 2009
Beam homogenizer and laser irradiation apparatus
SEMICONDUCTOR ENERGY LAB7 citations74
US7450307B2Nov 11, 2008
Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB5 citations74
US7179699B2Feb 20, 2007
Method of fabricating semiconductor device
SEMICONDUCTOR ENERGY LAB8 citations74
US6765175B2Jul 20, 2004
Laser irradiation apparatus, laser irradiation method, and manufacturing method for a semiconductor device
SEMICONDUCTOR ENERGY LAB5 citations74
US11901372B2Feb 13, 2024
Wiring layer and manufacturing method therefor
SEMICONDUCTOR ENERGY LAB1 citations73
US11729965B2Aug 15, 2023
Capacitor, semiconductor device, and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations73
US11670705B2Jun 6, 2023
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations73
US11616085B2Mar 28, 2023
Wiring layer and manufacturing method therefor
SEMICONDUCTOR ENERGY LAB1 citations73
US11282964B2Mar 22, 2022
Semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations73
US11211408B2Dec 28, 2021
Wiring layer and manufacturing method therefor
SEMICONDUCTOR ENERGY LAB2 citations73
US10644039B2May 5, 2020
Wiring layer and manufacturing method therefor
SEMICONDUCTOR ENERGY LAB2 citations73
US10304864B2May 28, 2019
Wiring layer and manufacturing method therefor
SEMICONDUCTOR ENERGY LAB2 citations73
US10032919B2Jul 24, 2018
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations73
US9276125B2Mar 1, 2016
Semiconductor device and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB3 citations73
US8993421B2Mar 31, 2015
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations73
US12495615B2Dec 9, 2025
Semiconductor device, manufacturing method thereof, and electronic device
SEMICONDUCTOR ENERGY LAB0 citations63
US12183747B2Dec 31, 2024
Wiring layer and manufacturing method therefor
SEMICONDUCTOR ENERGY LAB0 citations63
US11282860B2Mar 22, 2022
Semiconductor device, manufacturing method thereof, and electronic device
SEMICONDUCTOR ENERGY LAB0 citations63
US10074672B2Sep 11, 2018
Device, manufacturing method thereof, and electronic device
SEMICONDUCTOR ENERGY LAB1 citations63
US9728559B2Aug 8, 2017
Device, manufacturing method thereof, and electronic device
SEMICONDUCTOR ENERGY LAB1 citations63
US8349714B2Jan 8, 2013
Method of crystallizing semiconductor film and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB3 citations63
US7927983B2Apr 19, 2011
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB3 citations63
US7842565B2Nov 30, 2010
Beam homogenizer and laser irradiation apparatus
SEMICONDUCTOR ENERGY LAB2 citations63
US7682949B2Mar 23, 2010
Laser treatment device, laser treatment method, and semiconductor device fabrication method
SEMICONDUCTOR ENERGY LAB4 citations63
MORIWAKA TOMOAKI
5 patentsUS8432021B2Apr 30, 2013
Manufacturing method of SOI substrate
MORIWAKA TOMOAKI20 citations92
US8058709B2Nov 15, 2011
Semiconductor device and manufacturing method thereof
MORIWAKA TOMOAKI20 citations92
US8278739B2Oct 2, 2012
Crystalline semiconductor film, semiconductor device, and method for manufacturing thereof
MORIWAKA TOMOAKI6 citations73
US9177811B2Nov 3, 2015
Method for manufacturing semiconductor device
MORIWAKA TOMOAKI1 citations63
US8216892B2Jul 10, 2012
Method for manufacturing crystalline semiconductor film
MORIWAKA TOMOAKI3 citations63
MIYAIRI HIDEKAZU
1 patentTANAKA KOICHIRO
1 patentShowing the top 50 of 81 patents by PatentIndex Score.