Inventor · disambiguated record

Elke Eckstein

Also filed as: ECKSTEIN ELKE

1 granted patent·21 citations·filing 1995–1995

41Inventor score

Technology areasH10P

Files withSIEMENS AG1

Top patents by PatentIndex Score

1 record

0151US5670018AIsotropic silicon etch process that is highly selective to tungstenSIEMENS AG·Filed 1995·Granted Sep 23, 1997·21 cites·20 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →