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Inventor
WEISS MARC JAY
US
2 patents
⚠️ This page may combine multiple inventors who share the name “WEISS MARC JAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
1 patent
US6258497B1
Jul 10, 2001
Precise endpoint detection for etching processes
IBM
38 citations
85
SIEMENS AG
1 patent
US5670018A
Sep 23, 1997
Isotropic silicon etch process that is highly selective to tungsten
SIEMENS AG
21 citations
85