Inventor
MERRY WALTER
US6 patents
Patents
6 patentsUS5819434AOct 13, 1998
Etch enhancement using an improved gas distribution plate
APPLIED MATERIALS INC608 citations98
US5780359AJul 14, 1998
Polymer removal from top surfaces and sidewalls of a semiconductor wafer
APPLIED MATERIALS INC67 citations96
US5786276AJul 28, 1998
Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of CH3F or CH2F2 and CF4 and O2
APPLIED MATERIALS INC317 citations95
US5789322AAug 4, 1998
Low volume gas distribution assembly for a chemical downstream etch tool
APPLIED MATERIALS INC26 citations92
US5728260AMar 17, 1998
Low volume gas distribution assembly and method for a chemical downstream etch tool
APPLIED MATERIALS INC18 citations92
US6062237AMay 16, 2000
Polymer removal from top surfaces and sidewalls of a semiconductor wafer
APPLIED MATERIALS INC13 citations73