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Inventor

LEE KE LING

US9 patents
⚠️ This page may combine multiple inventors who share the name “LEE KE LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US6015465AJan 18, 2000

Temperature control system for semiconductor process chamber

APPLIED MATERIALS INC743 citations97
US7086638B2Aug 8, 2006

Methods and apparatus for sealing an opening of a processing chamber

APPLIED MATERIALS INC34 citations92
US7469715B2Dec 30, 2008

Chamber isolation valve RF grounding

APPLIED MATERIALS INC12 citations83

STEAG HAMATECH AG

2 patents
US6406598B2Jun 18, 2002

System and method for transporting and sputter coating a substrate in a sputter deposition system

STEAG HAMATECH AG6 citations71
US6413381B1Jul 2, 2002

Horizontal sputtering system

STEAG HAMATECH AG3 citations60

SKE TECHNOLOGY CORP

1 patent
US6264804B1Jul 24, 2001

System and method for handling and masking a substrate in a sputter deposition system

SKE TECHNOLOGY CORP19 citations86

LEE KE LING

1 patent
US8327878B2Dec 11, 2012

Chamber isolation valve RF grounding

LEE KE LING3 citations57

GEN ELECTRIC

1 patent
US9959943B2May 1, 2018

Method and apparatuses for operating and repairing nuclear reactors

GEN ELECTRIC0 citations44

NOPWASKEY FRED CHARLES

1 patent
US8565366B2Oct 22, 2013

Methods and apparatuses for operating and repairing nuclear reactors

NOPWASKEY FRED CHARLES0 citations38