Inventor
DEVRIES KENNETH L
US4 patents
Patents
4 patentsUS5431772AJul 11, 1995
Selective silicon nitride plasma etching process
IBM58 citations88
US5188704AFeb 23, 1993
Selective silicon nitride plasma etching
IBM38 citations88
US7759173B2Jul 20, 2010
Methods for charge dissipation in integrated circuits
IBM11 citations80
US7408206B2Aug 5, 2008
Method and structure for charge dissipation in integrated circuits
IBM5 citations59