Inventor
BUSCHBECK HERBERT
AT8 patents
⚠️ This page may combine multiple inventors who share the name “BUSCHBECK HERBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IMS NANOFABRICATION GMBH
4 patentsUS7388217B2Jun 17, 2008
Particle-optical projection system
IMS NANOFABRICATION GMBH1,464 citations98
US6768125B2Jul 27, 2004
Maskless particle-beam system for exposing a pattern on a substrate
IMS NANOFABRICATION GMBH186 citations97
US7199373B2Apr 3, 2007
Particle-optic electrostatic lens
IMS NANOFABRICATION GMBH27 citations91
US7436120B2Oct 14, 2008
Compensation of magnetic fields
IMS NANOFABRICATION GMBH8 citations73