P

Inventor

VONACH HERBERT

AT10 patents
⚠️ This page may combine multiple inventors who share the name “VONACH HERBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMS IONEN MIKROFAB SYST

4 patents
US5876880AMar 2, 1999

Process for producing a structured mask

IMS IONEN MIKROFAB SYST19 citations83
US5874739AFeb 23, 1999

Arrangement for shadow-casting lithography

IMS IONEN MIKROFAB SYST9 citations73
US5436460AJul 25, 1995

Ion-optical imaging system

IMS IONEN MIKROFAB SYST11 citations73
US5693950ADec 2, 1997

Projection system for charged particles

IMS IONEN MIKROFAB SYST5 citations62

IMS NANOFABRICATION GMBH

1 patent
US6768125B2Jul 27, 2004

Maskless particle-beam system for exposing a pattern on a substrate

IMS NANOFABRICATION GMBH186 citations97

IMS INNENMIKROFABRIKATIONS SYS

1 patent
US6989546B2Jan 24, 2006

Particle multibeam lithography

IMS INNENMIKROFABRIKATIONS SYS40 citations89

IMS MIKROFABRIKATIONS SYSTEME

1 patent
US5742062AApr 21, 1998

Arrangement for masked beam lithography by means of electrically charged particles

IMS MIKROFABRIKATIONS SYSTEME20 citations88

IMS IONEN MIKROPFABRIKATIONS S

1 patent
US5801388ASep 1, 1998

Particle beam, in particular ionic optic imaging system

IMS IONEN MIKROPFABRIKATIONS S17 citations79

IMS IONEN MIKROFABRATIONS SYST

1 patent
US5378917AJan 3, 1995

Particle-beam imaging system

IMS IONEN MIKROFABRATIONS SYST17 citations69

ZEISS CARL SMS GMBH

1 patent
US8049189B2Nov 1, 2011

Charged particle system

ZEISS CARL SMS GMBH1 citations51