Inventor

GERAETS HUBERTUS ANTONIUS

BE5 patents

⚠️ This page may combine multiple inventors who share the name “GERAETS HUBERTUS ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US9983489B2May 29, 2018

Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation

ASML NETHERLANDS BV5 citations71

US9519224B2Dec 13, 2016

Lithographic apparatus and method

ASML NETHERLANDS BV2 citations56

HOFMANS GERARDUS CAROLUS JOHANNUS

2 patents

US8436998B2May 7, 2013

Method of measuring focus of a lithographic projection apparatus

HOFMANS GERARDUS CAROLUS JOHANNUS3 citations56

US8289516B2Oct 16, 2012

Method of measuring focus of a lithographic projection apparatus

HOFMANS GERARDUS CAROLUS JOHANNUS2 citations56

GERAETS HUBERTUS ANTONIUS

1 patent

US8908148B2Dec 9, 2014

Calibration method and inspection apparatus

GERAETS HUBERTUS ANTONIUS9 citations76