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Inventor
DECKER-LUCKE KURT
US
3 patents
⚠️ This page may combine multiple inventors who share the name “DECKER-LUCKE KURT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PRADHAN NILAY ANIL
1 patent
US8722431B2
May 13, 2014
FinFET device fabrication using thermal implantation
PRADHAN NILAY ANIL
7 citations
73
VARIAN SEMICONDUCTOR EQUIPMENT
1 patent
US8592786B2
Nov 26, 2013
Platen clamping surface monitoring
VARIAN SEMICONDUCTOR EQUIPMENT
3 citations
60
APPLIED MATERIALS INC
1 patent
US12444615B2
Oct 14, 2025
Forming a doped hardmask
APPLIED MATERIALS INC
0 citations
57