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Inventor
HAMAGUCHI JUNICHI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “HAMAGUCHI JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
2 patents
US8883632B2
Nov 11, 2014
Manufacturing method and manufacturing apparatus of device
ULVAC INC
2 citations
57
US9337092B2
May 10, 2016
Method of manufacturing semiconductor device
ULVAC INC
0 citations
42
KODAIRA SHUJI
1 patent
US9005413B2
Apr 14, 2015
Film formation apparatus
KODAIRA SHUJI
4 citations
60
MORIMOTO NAOKI
1 patent
US8834685B2
Sep 16, 2014
Sputtering apparatus and sputtering method
MORIMOTO NAOKI
2 citations
59