Inventor

KODAIRA SHUJI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KODAIRA SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC INC

2 patents

US8883632B2Nov 11, 2014

Manufacturing method and manufacturing apparatus of device

ULVAC INC2 citations57

US9337092B2May 10, 2016

Method of manufacturing semiconductor device

ULVAC INC0 citations42

KODAIRA SHUJI

1 patent

US9005413B2Apr 14, 2015

Film formation apparatus

KODAIRA SHUJI4 citations60