Inventor

KIM MUNJA

KR4 patents

⚠️ This page may combine multiple inventors who share the name “KIM MUNJA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US10274820B2Apr 30, 2019

Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same

SAMSUNG ELECTRONICS CO LTD1 citations56

US9753367B2Sep 5, 2017

Methods of fabricating pellicles using supporting layer

SAMSUNG ELECTRONICS CO LTD0 citations49

US9612528B2Apr 4, 2017

Methods of manufacturing pellicles having graphite layers

SAMSUNG ELECTRONICS CO LTD1 citations47

JEON HWANCHUL

1 patent

US9952502B2Apr 24, 2018

Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same

JEON HWANCHUL2 citations61