Inventor

MANSSOURI KHALID

NL2 patents

⚠️ This page may combine multiple inventors who share the name “MANSSOURI KHALID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US9715182B2Jul 25, 2017

Lithographic apparatus, substrate support system, device manufacturing method and control program

ASML NETHERLANDS BV1 citations45

DE VOS YOUSSEF KAREL MARIA

1 patent

US8830442B2Sep 9, 2014

Servo control system, lithographic apparatus and control method

DE VOS YOUSSEF KAREL MARIA0 citations30