Inventor
GAO LARRY
US4 patents
Patents
4 patentsUS11776811B2Oct 3, 2023
Selective deposition of carbon on photoresist layer for lithography applications
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US12249509B2Mar 11, 2025
Selective deposition of carbon on photoresist layer for lithography applications
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US10867795B2Dec 15, 2020
Method of etching hardmasks containing high hardness materials
APPLIED MATERIALS INC0 citations50
US12283484B2Apr 22, 2025
Selective deposition of carbon on photoresist layer for lithography applications
APPLIED MATERIALS INC0 citations47