Inventor
BOGIAGES JR WILLIAM R
US3 patents
Patents
3 patentsUS11664192B2May 30, 2023
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC6 citations82
US11170973B2Nov 9, 2021
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC8 citations81
US12400828B2Aug 26, 2025
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC0 citations59