Inventor
DEI SATOSHI
JP6 patents
Patents
6 patentsUS12312487B2May 27, 2025
Method for forming protective film, method for manufacturing patterned substrate, and composition
JSR CORP0 citations55
US10090163B2Oct 2, 2018
Inorganic film-forming composition for multilayer resist processes, and pattern-forming method
JSR CORP1 citations50
US12572075B2Mar 10, 2026
Composition, method of forming resist underlayer film, and method of forming resist pattern
JSR CORP0 citations45
US9434609B2Sep 6, 2016
Method for forming pattern, and polysiloxane composition
JSR CORP0 citations39
US9329478B2May 3, 2016
Polysiloxane composition and pattern-forming method
JSR CORP0 citations39
US9126231B2Sep 8, 2015
Insulation pattern-forming method and insulation pattern-forming material
JSR CORP0 citations39