Inventor
YAMAMOTO SHIRUSHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMOTO SHIRUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
2 patentsUS4610953ASep 9, 1986
Aqueous developer solution for positive type photoresists with tetramethyl ammonium hydroxide and trimethyl hydroxyethyl ammonium hydroxide
TOKYO OHKA KOGYO CO LTD21 citations81
US4797348AJan 10, 1989
Method of forming a positive resist pattern in photoresist of o-naphthoquinone diazide and bisazide with UV imaging exposure and far UV overall exposure
TOKYO OHKA KOGYO CO LTD7 citations72